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Microlithography / process technology for ic fabrication

Elliott, David

Microlithography / process technology for ic fabrication David Elliott - New York McGraw-Hill 1986 - xix, 378p. ill. 23cm.

Includes index

ISBN: 0070193045 RM53.60

Subjects--Topical Terms:
Ingrated circuits--Very large scale integration--Design and construction
Microlithography
Photo-resists

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