Microchip fabrication / a practical guide to semiconductor processing

Van Zant, Peter

Microchip fabrication / a practical guide to semiconductor processing Peter Van Zant - 3rd ed. - New York McGraw-Hill 1997 - xvi, 623p. ill. 24cm.

Includes bibliographical references and index

007114837X RM75.80


Integrated circuits--Design and construction
Semiconductors--Design and construction