Elliott, David <br/><br/>
Microlithography /  process technology for ic fabrication 
David Elliott 
 - New York  McGraw-Hill  1986 
 - xix, 378p.  ill.  23cm. 
<br/><br/>Includes index 
<br/><br/><label>ISBN: </label>0070193045  RM53.60 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Ingrated circuits--Very large scale integration--Design and construction<br/>Microlithography<br/>Photo-resists