TY  - BOOK
AU  - Elliott,David
TI  - Microlithography: process technology for ic fabrication
SN  - 0070193045
PY  - 1986///
CY  - New York
PB  - McGraw-Hill
KW  - Ingrated circuits
KW  - Very large scale integration
KW  - Design and construction
KW  - Microlithography
KW  - Photo-resists
N1  - Includes index
ER  -